A unique measuring microscope with one objective above the measuring stage like any conventional measuring microscope and another objective installed below the measuring stage.
The “Two objective, single Camera” design allows top and bottom image to be viewed separately or combined to output on one display.
Widely used for top and bottom image pattern comparison, top and bottom image pattern matching inspection.
Top and bottom pattern offset and miss-match can also be measure accurately
Resolution : 1um, 0.5um, 0.1um
Stage travel : 100 x 100mm, 150x150mm and 300mm x 150mm
No Sample flipping required for top and bottom surface pattern comparison or measurement.
Objective : 3x, 5x, 10x, 20x, 40x, 100x objective
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