No. 12, Jalan Anggerik Doritis BA 31/BA,
Kota Kemuning,
40460 Shah Alam,
Selangor, Malaysia.
+603-5122 3833
+603-5122 3832
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Model | NS-3600 | ||||
Objective Lens | Magnification | 10X | 20X | 50X | 100X |
Observation / Measuring Range | Horizontal (H), um | 1400 | 700 | 280 | 140 |
Vertical (V), um | 1050 | 525 | 210 | 105 | |
Working Distance, mm | 17.5 | 4.5 | 1.0 | 1.0 | |
Numerical Aperture (N. A.) | 0.30 | 0.45 | 0.80 | 0.90 | |
Optical Zoom | x1 to x6 | ||||
Optical system for observation / measurement | Pin hole confocal optical system | ||||
Height Measurement | Scan Range | 10 mm | |||
Display Resolution | 0.001 um | ||||
Repeatability, σ | 0.02 um (100 times measurement of 1 um step height standard sample using 100X/0.9 objective) | ||||
Width Measurement | Display | 0.001 um | |||
Repeatability, 3σ | 0.03 um (100 times measurement of 5 um pitch standard sample using 100X/0.9 objective) | ||||
Frame Memory | Pixel Count | 1024x1024, 1024x768, 1024x384, 1024x192, 1024x96 | |||
For monochrome image | 12 bit | ||||
For color image | 8 bit for RGB each | ||||
For height measurement | 16 bit | ||||
Frame rate | Surface Scan | 20Hz to 160Hz | |||
Line Scan | ~ 8kHz | ||||
Laser beam light source for confocal measurement | Wavelength | Red laser, 638 nm | |||
Output | ~ 2mW | ||||
Laser class | 3b | ||||
Laser light receiving element | PMT (Photo Multiplier Tube) | ||||
Light source for optical observation | Lamp | LED | |||
Color camera for optical observation | Imaging element | Color CCD image sensor | |||
Recording Resolution | 1296 x 966 | ||||
Data Processing unit | Dedicated PC | ||||
Power Supply | Voltage | 100 to 240 VAC, 50/60 Hz | |||
Current | 500 VA max | ||||
Weight | Microscope | ~ 50kg (measuring head unit : ~ 12.5kg) | |||
Controller | ~ 8 kg | ||||
Vibration Isolation System | Pneumatic Isolator (optional) |